WebA large research reactor for performing dielectric barrier discharge (DBD) experiments at atmospheric pressure (AP) has been used with argon (Ar) carrier gas under constant plasma conditions (f = 20 kHz, Va(f) = 8 kVp-p = 2.8 kVrms). WebApr 19, 2024 · GRAPHICAL ABSTRACT ABSTRACT Two aminosilanes derived from hexamethyldisilazane as chemical vapor deposition (CVD) precursors for SiCxNy and relevant films have been reported and characterized by 1H, 13C, and 29Si NMR as well as by EI-MS and elemental analysis, where necessary. Thermal stability, transport behavior and …
Growth of SiC and SiCxNy films by pulsed laser ablation of SiC in …
WebFeb 9, 2024 · Title: Enhanced Wettability, Hardness and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering . The authors present a study concerning Si-C-N films. Globally the results are interesting and valuable and could deserve publication. However, several questions remains unclear. Consequently, I major revision ... WebIn this work, SiC x N y-based resistive switching memory by using a single precursor for the back end of line (BEOL) integration has been investigated.SiC x N y films were deposited … buypower login capital one
Low-k SiCxNy Films Prepared by Plasma-Enhanced …
WebFeb 2, 2000 · As expected, the deconvolution result revealed the coexistence of Si N, Si C and C N chemical bondings in the as-deposited film. Careful examination of the binding energy revealed slight shift in comparison with that of the binary film listed as reference in Table 1.For example, the binding energy of Si2p bonded with C was higher than that in SiC … WebJul 24, 2024 · We developed a novel process for the atomic layer deposition (ALD) of SiC x N y films using a Si 2 Cl 6 and a CH 3 NH 2 plasma. Under self-limiting growth conditions, this ALD process led to SiC x N y films with up to 9 atomic percent carbon with a conformality >95% in 5:1 aspect ratio nanostructures. The surface reactions during ALD, and in … WebThin SiCxNy films appear to be suitable to work as luminescent silicon based films due to their lower direct bandgap and chemical stability but have not yet been studied in great … buy power monitor